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PROCEEDINGS OF THE EMAS '99 EUROPEAN WORKSHOP 6th European Workshop in Konstanz, GermanyMikrochimica Acta, vol. 132, nos. 2-4, p. 113-539 (2000) Edited by: C.T. Walker, P. Karduck and A. Armigliato
This supplement of Mikrochimica Acta contains papers from the Sixth Workshop of the European Microbeam Analysis Society (EMAS) on Modern Developments and Applications in Microbeam Analysis, which took place from the 3rd to the 7th of May 1999 in the Konzilgebäude, Konstanz, Germany. The primary aim of this series of workshops is to assess the state of the art and reliability of microbeam analysis techniques. They also provide a forum where students and young scientists starting out on a career in microbeam analysis can meet and discuss with the established experts. The workshops have a very distinct format comprising invited tutorial lectures by eminent scientists, poster presentations by the participants and round-table discussions on the key topics led by experts in the field. For this meeting EMAS invited speakers on the following subjects: low-energy electron beam X-ray microanalysis, quantitative trace analysis by EPMA, X-ray microanalysis in the ESEM, quantitative AES mapping and depth profiling, XPS imaging in surface analysis, quantification in dynamic SIMS, high-resolution surface analysis by TOF-SIMS, analytical TEM with energy-filtered electrons, quantitative analysis of nanoparticles, microbeam analysis in a service laboratory, applications of microbeam analysis techniques in the steel industry, characterisation of defects in glass using microbeam analysis techniques, and microbeam analysis in the study of the formation and history of rocks.
The continuing relevance of the EMAS workshops and the high regard in which they are held internationally can be seen from the fact that 85 posters from 21 different countries were on display at the meeting and that the participants came from as far away as the USA, Japan and South Africa. Participants with posters were invited to give a short oral presentation of their work in two dedicated sessions. As at the previous workshop in Torquay there was a special session for young scientists. Small cash prizes were awarded for the best poster and for the best oral presentation by a young scientist. The prize for the best poster went to Xavier Llovet from the Serveis Cientifico-Tècnics of the Universitat de Barcelona for "Monte-Carlo simulation of secondary fluorescence in small particles and at phase boundaries" and the prize for the best oral presentation by a young scientist was awarded to Markus Pidun from the Gemeinshaftslabor für Elektronenmikroskopie of the Rheinland-Westfälische Technishe Hochschule in Aachen for "Comparative investigation of a heat-insulating coating on floatglass using AES, EPMA, SIMS and SNMS".
This proceedings volume contains the full texts of twelve of the tutorial lectures and of forty two papers on related topics originating from the posters presented at the workshop. All the papers have been subjected to peer review by two referees. The Proceedings of all previous EMAS workshops were also published either in a regular issue or a supplement to Mikrochimica Acta. Undoubtedly, as with the others in the series, the present volume will form a key source of reference for scientists and technicians using microbeam analysis techniques.
Table of contents High-spatial-resolution low-energy electron beam X-ray microanalysis. I. Barkshire, P. Karduck, W.P. Rehbach and S. Richter 113 Low-voltage EDXS and elements of the first transition series. P. Pölt 129 X-ray microanalysis in the environmental SEM: A challenge or a contradiction? J.F. Mansfield 137 Quantitative trace analysis by wavelength-dispersive EPMA. S.J.B. Reed 145 Spectral interferences in light element analysis. A. Buckley and S.J.B. Reed 153 Effective L-series mass absorption coefficients for EDS. D.G. Rickerby and N. Wachter 157 Relative cross-sections for L- and M-shell ionisation by electron impact. X. Llovet, C. Merlet, J.M. Fernández-Varea and F. Salvat 163 About the secondary electron emission yield, d , from e--irradiated insulators. J. Cazaux 173 Electron backscattering from real and in-situ treated surfaces. L. Frank, R. Steklý, M. Zadrazil, M.M. El-Gomati and I. Müllerová 179 EPMA of porous media: A Monte-Carlo approach. L. Sorbier; E. Rosenberg, C. Merlet and X. Llovet 189 Simulation of X-ray emission from rough surfaces. R. Gauvin and E. Lifshin 201 Monte-Carlo simulation of secondary fluorescence in small particles and at phase boundaries. X. Llovet, E. Valovirta and E. Heikinheimo 205 A novel Monte-Carlo based method for quantitative thin film X-ray microanalysis. A. Armigliato, R. Balboni, S. Frabboni and R. Rosa 213 Mathematical modelling of 3D electron-photon transport in microbeam analysis. J.E. Fernández, V.G. Molinari and F. Teodori 219 Quantitative AES-mapping and depth profiling. M. Prutton, D.K. Wilkinson and D.A. Loveday 225 Distribution of ion-implanted nitrogen in iron alloys investigated by AES. S. Baunack, G. Schreiber, H. Oettel, C. Blawert and B.L. Mordike 237 Dynamic SIMS: Quantification at all depths? P.C. Zalm 243 High-resolution surface analysis by TOF-SIMS. B. Hagenhoff 259 Quantitative energy-filtering transmission electron microscopy (EFTEM). F. Hofer, W. Grogger, P. Warbichler and I. Papst 273 Analytical electron microscopy study of a ZnO-NiO solid solution. G. Drazic and D. Lisjak 289 AEM of the solute redistribution during discontinuous dissolution. P. Zieba and W. Gust 295 Analysis of alloy nanoparticles. C.E. Lyman, R.E. Lakis, H.G. Stenger Jr., B. Tøtdal and R. Prestvik 301 Structural analysis of electroplated amorphous-nanocrystalline Ni-W. P. Schlossmacher and T. Yamasaki 309 Study of the interface microstructures of CVD diamond films by TEM. A.G. Fitzgerald, Y. Fan, P. John, C.E. Troupe, J.I.B. Wilson, A.O. Tooke and B.E. Storey 315 Application of microbeam techniques in the steel industry. H. Dillen, C. Xhoffer, H. Storms and L. Kestens 323 SEM-EDS and XPS studies of the high-temperature oxidation behaviour of Inconel 718. F. Delaunay, C. Berthier, M. Lenglet and J.-M. Lameille 337 SEM-EDS investigation of scale formation on low carbon, low alloy steel. P.J. Szabó and E. Dénes 345 Light element analysis of individual microparticles using thin-window EPMA. J. Osán, I. Szalóki, C.-U. Ro and R.E. Van Grieken 349 Detection limits of grazing-exit EPMA for particle analysis. K. Tsuji, Z. Spolnik, K. Wagatsuma, R. Nullens and R.E. Van Grieken 357 Investigation of inhomogeneities in epitaxial AlxGa1-xN layers grown on sapphire. V.V. Tretyakov, S.A. Rukolaine, A.S. Usikov and S.V. Makarov 361 Study of thin films of high-temperature superconductors based on YBaCuO by EPMA. V.V. Tretyakov, S.V. Kazakov, A.V. Bobyl and S.G. Konnikov 365 Application of sputter-assisted EPMA to depth profile analysis. N. Lesch, A. Aretz, M. Pidun, S. Richter and P. Karduck 377 EPMA and microstructural characterisation of yttrium-doped BaTiO3 ceramics. Z. Samardzija, D. Makovec and M. Ceh 383 The observation of strong absorption of the yttrium La line in sialon ceramics. M. Zelechower and M. Sopicka-Lizer 387 EMA of melted UO2 fuel rods irradiated to a burn-up of 23 GWd/tU. P.D.W. Bottomley, S. Brémier, J.-P. Glatz and C.T. Walker 391 Application of microbeam techniques to materials problems in a service laboratory. M. Kopnarski 401 Characterisation of radioactive particles by SIMS. G. Tamborini and M. Betti 411 EPMA and quantitative MCs+-SIMS of metal-DLC coating materials. P. Willich and U. Wischmann 419 Comparative analysis of a solar control coating on glass by AES, EPMA, SNMS and SIMS. M. Pidun, N. Lesch, S. Richter, P. Karduck, W. Bock, M. Kopnarski and P. Willich 429 Scanning probe microscopy and spectroscopy of CVD diamond films. Y. Fan, A.G. Fitzgerald, P. John, C.E. Troupe and J.I.B. Wilson 435 Analysis of slightly rough thin films by optical methods and AFM. D. Franta, I. Ohlídal and P. Klapetek 443 Contact potential difference of Au and GaInAs by electrostatic force microscopy. J.-F. Bresse 449 AFM investigation on Vickers indents: An artefact? P. Nagy, A. Juhász and E. Kálmán 457 Quantitative analysis of Ti-Si-Ge/Si-Ge/Si structures by EDS and AES. A.I. Berner, M.Y. Beregovsky and M.M. Eizenberg 461 Understanding the history of rocks by the use of microbeam analysis techniques. L.P. Ottolini 467 Multiple electron beam analyses applied to eclogite from the Western Alps. A. Borghi, D. Agnella, E. Belluso, R. Cossio and R. Ruffini 479 Sites are separable in garnets with ALCHEMI. J.L. Lábár, J. Morgiel, L. Tóth and I. Dódony 489 Characterisation of defects in glasses and coatings on glasses by microanalytical techniques. K. Bange, H. Müller and C. Strubel 493 Microanalysis of glass containing alkali ions. O. Gedeon, V. Hulínsky and K. Jurek 505 Electron probe microanalysis of nitrogen in glasses and glass ceramics. G. Völksch and J.M. Aroni 511 Orientation imaging microscopy applied to zirconia ceramics. M. Faryna, J. Jura and K. Sztwiertnia 517 A novel micro-structured reference materials for ion and X-ray microbeam analysis. U. Wätjen, I. Bársony and C. Dücsö 521 EDXTOOLS - Computer programmes for the determination of critical EDX spectrometer parameters. M. Procop 527 An expert system for EPMA. C. Fournier, C. Merlet, P.F. Staub and O. Dugne 531
Table of contents
High-spatial-resolution low-energy electron beam X-ray microanalysis. I. Barkshire, P. Karduck, W.P. Rehbach and S. Richter 113
Low-voltage EDXS and elements of the first transition series. P. Pölt 129
X-ray microanalysis in the environmental SEM: A challenge or a contradiction? J.F. Mansfield 137
Quantitative trace analysis by wavelength-dispersive EPMA. S.J.B. Reed 145
Spectral interferences in light element analysis. A. Buckley and S.J.B. Reed 153
Effective L-series mass absorption coefficients for EDS. D.G. Rickerby and N. Wachter 157
Relative cross-sections for L- and M-shell ionisation by electron impact. X. Llovet, C. Merlet, J.M. Fernández-Varea and F. Salvat 163
About the secondary electron emission yield, d , from e--irradiated insulators. J. Cazaux 173
Electron backscattering from real and in-situ treated surfaces. L. Frank, R. Steklý, M. Zadrazil, M.M. El-Gomati and I. Müllerová 179
EPMA of porous media: A Monte-Carlo approach. L. Sorbier; E. Rosenberg, C. Merlet and X. Llovet 189
Simulation of X-ray emission from rough surfaces. R. Gauvin and E. Lifshin 201
Monte-Carlo simulation of secondary fluorescence in small particles and at phase boundaries. X. Llovet, E. Valovirta and E. Heikinheimo 205
A novel Monte-Carlo based method for quantitative thin film X-ray microanalysis. A. Armigliato, R. Balboni, S. Frabboni and R. Rosa 213
Mathematical modelling of 3D electron-photon transport in microbeam analysis. J.E. Fernández, V.G. Molinari and F. Teodori 219
Quantitative AES-mapping and depth profiling. M. Prutton, D.K. Wilkinson and D.A. Loveday 225
Distribution of ion-implanted nitrogen in iron alloys investigated by AES. S. Baunack, G. Schreiber, H. Oettel, C. Blawert and B.L. Mordike 237
Dynamic SIMS: Quantification at all depths? P.C. Zalm 243
High-resolution surface analysis by TOF-SIMS. B. Hagenhoff 259
Quantitative energy-filtering transmission electron microscopy (EFTEM). F. Hofer, W. Grogger, P. Warbichler and I. Papst 273
Analytical electron microscopy study of a ZnO-NiO solid solution. G. Drazic and D. Lisjak 289
AEM of the solute redistribution during discontinuous dissolution. P. Zieba and W. Gust 295
Analysis of alloy nanoparticles. C.E. Lyman, R.E. Lakis, H.G. Stenger Jr., B. Tøtdal and R. Prestvik 301
Structural analysis of electroplated amorphous-nanocrystalline Ni-W. P. Schlossmacher and T. Yamasaki 309
Study of the interface microstructures of CVD diamond films by TEM.
A.G. Fitzgerald, Y. Fan, P. John, C.E. Troupe, J.I.B. Wilson, A.O. Tooke and B.E. Storey 315
Application of microbeam techniques in the steel industry. H. Dillen, C. Xhoffer, H. Storms and L. Kestens 323
SEM-EDS and XPS studies of the high-temperature oxidation behaviour of Inconel 718. F. Delaunay, C. Berthier, M. Lenglet and J.-M. Lameille 337
SEM-EDS investigation of scale formation on low carbon, low alloy steel. P.J. Szabó and E. Dénes 345
Light element analysis of individual microparticles using thin-window EPMA. J. Osán, I. Szalóki, C.-U. Ro and R.E. Van Grieken 349
Detection limits of grazing-exit EPMA for particle analysis. K. Tsuji, Z. Spolnik, K. Wagatsuma, R. Nullens and R.E. Van Grieken 357
Investigation of inhomogeneities in epitaxial AlxGa1-xN layers grown on sapphire. V.V. Tretyakov, S.A. Rukolaine, A.S. Usikov and S.V. Makarov 361
Study of thin films of high-temperature superconductors based on YBaCuO by EPMA. V.V. Tretyakov, S.V. Kazakov, A.V. Bobyl and S.G. Konnikov 365
Application of sputter-assisted EPMA to depth profile analysis. N. Lesch, A. Aretz, M. Pidun, S. Richter and P. Karduck 377
EPMA and microstructural characterisation of yttrium-doped BaTiO3 ceramics. Z. Samardzija, D. Makovec and M. Ceh 383
The observation of strong absorption of the yttrium La line in sialon ceramics. M. Zelechower and M. Sopicka-Lizer 387
EMA of melted UO2 fuel rods irradiated to a burn-up of 23 GWd/tU. P.D.W. Bottomley, S. Brémier, J.-P. Glatz and C.T. Walker 391
Application of microbeam techniques to materials problems in a service laboratory. M. Kopnarski 401
Characterisation of radioactive particles by SIMS. G. Tamborini and M. Betti 411
EPMA and quantitative MCs+-SIMS of metal-DLC coating materials. P. Willich and U. Wischmann 419
Comparative analysis of a solar control coating on glass by AES, EPMA, SNMS and SIMS. M. Pidun, N. Lesch, S. Richter, P. Karduck, W. Bock, M. Kopnarski and P. Willich 429
Scanning probe microscopy and spectroscopy of CVD diamond films. Y. Fan, A.G. Fitzgerald, P. John, C.E. Troupe and J.I.B. Wilson 435
Analysis of slightly rough thin films by optical methods and AFM. D. Franta, I. Ohlídal and P. Klapetek 443
Contact potential difference of Au and GaInAs by electrostatic force microscopy. J.-F. Bresse 449
AFM investigation on Vickers indents: An artefact? P. Nagy, A. Juhász and E. Kálmán 457
Quantitative analysis of Ti-Si-Ge/Si-Ge/Si structures by EDS and AES. A.I. Berner, M.Y. Beregovsky and M.M. Eizenberg 461
Understanding the history of rocks by the use of microbeam analysis techniques. L.P. Ottolini 467
Multiple electron beam analyses applied to eclogite from the Western Alps. A. Borghi, D. Agnella, E. Belluso, R. Cossio and R. Ruffini 479
Sites are separable in garnets with ALCHEMI. J.L. Lábár, J. Morgiel, L. Tóth and I. Dódony 489
Characterisation of defects in glasses and coatings on glasses by microanalytical techniques. K. Bange, H. Müller and C. Strubel 493
Microanalysis of glass containing alkali ions. O. Gedeon, V. Hulínsky and K. Jurek 505
Electron probe microanalysis of nitrogen in glasses and glass ceramics. G. Völksch and J.M. Aroni 511
Orientation imaging microscopy applied to zirconia ceramics. M. Faryna, J. Jura and K. Sztwiertnia 517
A novel micro-structured reference materials for ion and X-ray microbeam analysis. U. Wätjen, I. Bársony and C. Dücsö 521
EDXTOOLS - Computer programmes for the determination of critical EDX spectrometer parameters. M. Procop 527
An expert system for EPMA. C. Fournier, C. Merlet, P.F. Staub and O. Dugne 531
